Kurt J. Lesker Vacuum Course

July 31, 2014 @ 10:00 am – 2:00 pm
1080 Physics Research Building
Rachel Page

KJLC will present a short course for basic vacuum technology, gauging, and physical vapor deposition. Please RSVP to Rachel Page (page.257@osu.edu) by 7/18/14

Vacuum Basics

  • Book Resources
  • Gas-Solid Interations
  • Flow Regimes
  • Conductance
  • Pumping Speed
  • Gas Load
  • Outgassing
  • Pump Throughput

Vacuum Gauging

  • What makes vacuum pressure difficult to measure?
  • The Ideal Gas Laws and gas law variables
  • Gas Dependent vs. Gas Independent gauges
  • Examples of gauging systems

Physical Vapor Deposition

  • Book Resources
  • Major PVD Methods: Thermal Evaporation, E-Beam Evaporation, Sputtering
  • Deposition and Film Growth
  • Practical Technical Issues